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2012
Purwins, H., "Regression Methods for Virtual Metrology of Layer Thickness in Chemical Vapor Deposition", IEEE/ASME Transactions on Mechatronics, 2012.
application/pdf iconetal_2012.pdf
2011
Purwins, H., A. Nagi, B. Barak, U. Hockele, A. Kyek, B. Lenz, G. Pfeifer, and K. Weinzierl, Regression Methods for Prediction of PECVD Silicon Nitride Layer Thickness, , 2011.
application/pdf iconCASE2011.pdf