{\rtf1\ansi\deff0\deftab360

{\fonttbl
{\f0\fswiss\fcharset0 Arial}
{\f1\froman\fcharset0 Times New Roman}
{\f2\fswiss\fcharset0 Verdana}
{\f3\froman\fcharset2 Symbol}
}

{\colortbl;
\red0\green0\blue0;
}

{\info
{\author Biblio}{\operator }{\title Biblio RTF Export}}

\f1\fs24
\paperw11907\paperh16839
\pgncont\pgndec\pgnstarts1\pgnrestart
Purwins, H., A. Nagi, B. Barak, U. Hockele, A. Kyek, B. Lenz, G. Pfeifer, and K. Weinzierl,  \i Regression Methods for Prediction of PECVD Silicon Nitride Layer Thickness, \i0  , 2011.\par \par }