<?xml version="1.0" encoding="UTF-8"?><xml><records><record><source-app name="Biblio" version="6.x">Drupal-Biblio</source-app><ref-type>47</ref-type><contributors><authors><author><style face="normal" font="default" size="100%">Hendrik Purwins</style></author><author><style face="normal" font="default" size="100%">Ahmed Nagi</style></author><author><style face="normal" font="default" size="100%">Bernd Barak</style></author><author><style face="normal" font="default" size="100%">Uwe Hockele</style></author><author><style face="normal" font="default" size="100%">Andreas Kyek</style></author><author><style face="normal" font="default" size="100%">Benjamin Lenz</style></author><author><style face="normal" font="default" size="100%">Gunter Pfeifer</style></author><author><style face="normal" font="default" size="100%">Kurt Weinzierl</style></author></authors></contributors><titles><title><style face="normal" font="default" size="100%">Regression Methods for Prediction of PECVD Silicon Nitride Layer Thickness</style></title></titles><dates><year><style  face="normal" font="default" size="100%">2011</style></year></dates></record></records></xml>