2012
2011
Purwins, H., A. Nagi, B. Barak, U. Höckele, A. Kyek, B. Lenz, G. Pfeifer, and K. Weinzierl,
"Regression Methods for Prediction - CASE Conference 2011",
August 25 IEEE Conference on Automation Science and Engineering, Trieste, Triest, 2011.
Purwins, H., A. Nagi, B. Barak, U. Hockele, A. Kyek, B. Lenz, G. Pfeifer, and K. Weinzierl,
Regression Methods for Prediction of PECVD Silicon Nitride Layer Thickness,
, 2011.
2010
Hayderer, G., M. Radl, P. Scheibelhofer, E. Stadlober, H. Purwins, T. Purwins, and D. Gleispach,
Scheduling of Foreline Maintenance on a CVD Tool Based on FDC Parameter,
, 2010.